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Sub-wavelength transmission and reflection mode tabletop imaging with 13nm illumination via ptychography CDI

TitleSub-wavelength transmission and reflection mode tabletop imaging with 13nm illumination via ptychography CDI
Publication TypeConference Paper
Year of Publication2017
AuthorsTanksalvala, M, Porter, CL, Gardner, DF, Gerrity, M, Mancini, GF, Zhang, X, Miley, GP, Shanblatt, ER, Galloway, BR, Bevis, CS, Karl, R, Adams, DA, Kapteyn, HC, Murnane, MM
EditorSanchez, MI, Ukraintsev, VA
Conference NameSPIE Proceedings: SPIE Advanced LithographyMetrology, Inspection, and Process Control for Microlithography XXXI
PublisherSPIE
Conference LocationSan Jose, California, United States
URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2271386
DOI10.1117/12.2271386