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EUV Microscopy with a Tabletop High Harmonic Generation Source: Generalizing Coherent Di ractive Imaging to Extended Samples in Transmission, Reflection, and Hyperspectral Modalities

TitleEUV Microscopy with a Tabletop High Harmonic Generation Source: Generalizing Coherent Di ractive Imaging to Extended Samples in Transmission, Reflection, and Hyperspectral Modalities
Publication TypeThesis
Year of Publication2015
AuthorsZhang, B
Academic DepartmentPhysics
DegreePh.D.
Number of Pages119
Date Published2015-02
UniversityUniversity of Colorado
CityBoulder
Abstract

Imaging at the nanoscale is of great interest for applications in materials science, nanoscience and biology. The microscopy method developed in this thesis combines a tabletop coherent EUV/Xray source based on high harmonic generation, and an image-forming method based on coherent diffractive imaging. This microscopy method offers truly diffraction-limited resolution; however, previous work has been limited to thin, isolated samples in transmission mode. This thesis work extends this tool for imaging non-isolated samples, and for working in reflection mode to image surface features of thick samples. The quantitative phase information of the reflection image enables surface prolometry capability with sub-nanometer precision. The microscope developed in this work is also demonstrated to have hyperspectral capability with simultaneous multi-wavelength illumination, without the need for wavelength scanning or energy-resolved detectors. In the future, by taking advantage of the short-pulse nature of the high harmonic illumination, this microscope will be able to image nanoscale ultrafast dynamics with 10 femtosecond temporal resolution, openingthe door for imaging at the space-time limits.