TY - JOUR
AU - Alan Gallagher
AU - John Doyle
AU - D. Doughty
BT - MRS Proceedings
DA - Jan-01-1989
DO - 10.1557/PROC-149-23
PY - 1989
T2 - MRS Proceedings
TI - Plasma Chemistry in Silane and Silane-Germane Discharge Deposition
VL - 149
ER -