TY - JOUR
AU - G.-H. Lin
AU - John Doyle
AU - Muzhi He
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-1988
DO - 10.1063/1.341461
PY - 1988
EP - 188
T2 - Journal of Applied Physics
TI - Argon sputtering analysis of the growing surface of hydrogenated amorphous silicon films
VL - 64
SN - 00218979
ER -