TY - JOUR AU - Alan Gallagher BT - International Journal of Solar Energy DA - Jan-12-1987 DO - 10.1080/01425918708914428 PY - 1987 SP - 311 EP - 322 T2 - International Journal of Solar Energy TI - Apparatus Design for Glow-Discharge a-Si: H Film-Deposition VL - 5 SN - 0142-5919 ER -