TY - JOUR
AU - D. Doughty
AU - John Doyle
AU - G.-H. Lin
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-1990
DO - 10.1063/1.345188
PY - 1990
EP - 6220
T2 - Journal of Applied Physics
TI - Surface reaction probability of film-producing radicals in silane glow discharges
VL - 67
SN - 00218979
ER -