TY - JOUR
AU - John Doyle
AU - D. Doughty
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-1990
DO - 10.1063/1.346186
PY - 1990
EP - 4375
T2 - Journal of Applied Physics
TI - Silane dissociation products in deposition discharges
VL - 68
SN - 00218979
ER -