TY - JOUR
AU - Robert Levis
AU - C. Waltman
AU - L. Cousins
AU - Guild Copeland
AU - Stephen Leone
BT - Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films
DA - Jan-07-1990
DO - 10.1116/1.576594
PY - 1990
EP - 3118
T2 - Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films
TI - A hyperthermal (0.1\textendash4 eV) F atom beam source suitable for surface etching investigations
VL - 8
SN - 07342101
ER -