TY - JOUR
AU - D. Doughty
AU - Alan Gallagher
BT - Physical Review A
DA - Jan-11-1990
DO - 10.1103/PhysRevA.42.6166
PY - 1990
SP - 6166
EP - 6170
T2 - Physical Review A
TI - Causes of SiH4 dissociation in silane dc discharges
VL - 42
SN - 1050-2947
ER -