TY - JOUR KW - pfc AU - J. Teufel AU - T. Donner AU - M. Castellanos-Beltran AU - J. Harlow AU - Konrad Lehnert BT - Nature Nanotechnology DA - 2009-12 DO - 10.1038/nnano.2009.343 PY - 2009 SP - 820 EP - 823 T2 - Nature Nanotechnology TI - Nanomechanical motion measured with an imprecision below that at the standard quantum limit VL - 4 SN - 1748-3387 ER -