TY - JOUR
AU - Michael Tanksalvala
AU - Christina Porter
AU - Yuka Esashi
AU - Bin Wang
AU - Nicholas Jenkins
AU - Zhe Zhang
AU - Galen Miley
AU - Joshua Knobloch
AU - Brendan McBennett
AU - Naoto Horiguchi
AU - Sadegh Yazdi
AU - Jihan Zhou
AU - Matthew Jacobs
AU - Charles Bevis
AU - Robert Karl
AU - Peter Johnsen
AU - David Ren
AU - Laura Waller
AU - Daniel Adams
AU - Seth Cousin
AU - Chen-Ting Liao
AU - Jianwei Miao
AU - Michael Gerrity
AU - Henry Kapteyn
AU - Margaret Murnane
AB - Next-generation nano- and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here, we present the first phase-sensitive extreme ultraviolet imaging reflectometer. It combines the excellent phase stability of coherent high-harmonic sources, the unique chemical sensitivity of extreme ultraviolet reflectometry, and state-of-the-art ptychography imaging algorithms. This tabletop microscope can nondestructively probe surface topography, layer thicknesses, and interface quality, as well as dopant concentrations and profiles. High-fidelity imaging was achieved by implementing variable-angle ptychographic imaging, by using total variation regularization to mitigate noise and artifacts in the reconstructed image, and by using a high-brightness, high-harmonic source with excellent intensity and wavefront stability. We validate our measurements through multiscale, multimodal imaging to show that this technique has unique advantages compared with other techniques based on electron and scanning probe microscopies.
BT - Science Advances
DA - 2021-01
DO - 10.1126/sciadv.abd9667
IS - 5
M1 - 5
N2 - Next-generation nano- and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here, we present the first phase-sensitive extreme ultraviolet imaging reflectometer. It combines the excellent phase stability of coherent high-harmonic sources, the unique chemical sensitivity of extreme ultraviolet reflectometry, and state-of-the-art ptychography imaging algorithms. This tabletop microscope can nondestructively probe surface topography, layer thicknesses, and interface quality, as well as dopant concentrations and profiles. High-fidelity imaging was achieved by implementing variable-angle ptychographic imaging, by using total variation regularization to mitigate noise and artifacts in the reconstructed image, and by using a high-brightness, high-harmonic source with excellent intensity and wavefront stability. We validate our measurements through multiscale, multimodal imaging to show that this technique has unique advantages compared with other techniques based on electron and scanning probe microscopies.
PB - American Association for the Advancement of Science
PY - 2021
EP - eabd9667
T2 - Science Advances
TI - Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry
UR - https://advances.sciencemag.org/content/7/5/eabd9667
VL - 7
ER -