TY - JOUR
KW - Atomic and Molecular Physics, and Optics
AU - Bin Wang
AU - Michael Tanksalvala
AU - Zhe Zhang
AU - Yuka Esashi
AU - Nicholas Jenkins
AU - Margaret Murnane
AU - Henry Kapteyn
AU - Chen-Ting Liao
BT - Optics Express
DA - 2021-01
DO - 10.1364/oe.414584
IS - 3
PB - The Optical Society
PY - 2021
SE - 3342-3358
EP - 3342
T2 - Optics Express
TI - Coherent Fourier scatterometry using orbital angular momentum beams for defect detection
UR - https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-29-3-3342&id=446755
VL - 29
SN - 1094-4087
ER -