@article{9238,
  author = {Alan Gallagher and John Doyle and D. Doughty},
  title = {Plasma Chemistry in Silane and Silane-Germane Discharge Deposition},
  year = {1989},
  journal = {MRS Proceedings},
  volume = {149},
  month = {Jan-01-1989},
  doi = {10.1557/PROC-149-23},
}