@article{9026,
  author = {John Doyle and R. Robertson and G.-H. Lin and M. He and Alan Gallagher},
  title = {Production of high-quality amorphous silicon films by evaporative silane surface decomposition},
  year = {1988},
  journal = {Journal of Applied Physics},
  volume = {64},
  pages = {3215},
  month = {Jan-01-1988},
  issn = {00218979},
  doi = {10.1063/1.341539},
}