@article{9003,
  author = {Alan Gallagher},
  title = {Neutral radical deposition from silane discharges},
  year = {1988},
  journal = {Journal of Applied Physics},
  volume = {63},
  pages = {2406},
  month = {Jan-01-1988},
  issn = {00218979},
  doi = {10.1063/1.341034},
}