@article{8875,
  author = {G.-H. Lin and John Doyle and Muzhi He and Alan Gallagher},
  title = {Argon sputtering analysis of the growing surface of hydrogenated amorphous silicon films},
  year = {1988},
  journal = {Journal of Applied Physics},
  volume = {64},
  pages = {188},
  month = {Jan-01-1988},
  issn = {00218979},
  doi = {10.1063/1.341461},
}