@article{8621,
  author = {Alan Gallagher},
  title = {Apparatus Design for Glow-Discharge a-Si: H Film-Deposition},
  year = {1987},
  journal = {International Journal of Solar Energy},
  volume = {5},
  pages = {311-322},
  month = {Jan-12-1987},
  issn = {0142-5919},
  doi = {10.1080/01425918708914428},
}