@article{8349,
  author = {Alan Gallagher},
  title = {Amorphous silicon deposition rates in diode and triode discharges},
  year = {1986},
  journal = {Journal of Applied Physics},
  volume = {60},
  pages = {1369},
  month = {Jan-01-1986},
  issn = {00218979},
  doi = {10.1063/1.337312},
}