@article{4556,
  author = {D. Doughty and John Doyle and G.-H. Lin and Alan Gallagher},
  title = {Surface reaction probability of film-producing radicals in silane glow discharges},
  year = {1990},
  journal = {Journal of Applied Physics},
  volume = {67},
  pages = {6220},
  month = {Jan-01-1990},
  issn = {00218979},
  doi = {10.1063/1.345188},
}