@article{4532,
  author = {John Doyle and D. Doughty and Alan Gallagher},
  title = {Silane dissociation products in deposition discharges},
  year = {1990},
  journal = {Journal of Applied Physics},
  volume = {68},
  pages = {4375},
  month = {Jan-01-1990},
  issn = {00218979},
  doi = {10.1063/1.346186},
}