@article{4438,
  author = {Robert Levis and C. Waltman and L. Cousins and Guild Copeland and Stephen Leone},
  title = {A hyperthermal (0.1\textendash4 eV) F atom beam source suitable for surface etching investigations},
  year = {1990},
  journal = {Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films},
  volume = {8},
  pages = {3118},
  month = {Jan-07-1990},
  issn = {07342101},
  doi = {10.1116/1.576594},
}