@article{4367,
  author = {D. Doughty and Alan Gallagher},
  title = {Causes of SiH4 dissociation in silane dc discharges},
  year = {1990},
  journal = {Physical Review A},
  volume = {42},
  pages = {6166-6170},
  month = {Jan-11-1990},
  issn = {1050-2947},
  doi = {10.1103/PhysRevA.42.6166},
}