@conference{3989, author = {Dennis Gardner and Elisabeth Shanblatt and Michael Tanksalvala and Xiaoshi Zhang and Benjamin Galloway and Christina Porter and Robert Karl and Charles Bevis and Bosheng Zhang and Matthew Seaberg and Giulia Mancini and Daniel Adams and Henry Kapteyn and Margaret Murnane}, title = {First Demonstration of Sub-Wavelength Imaging at Short Wavelengths}, abstract = {

By combining tabletop 13.5nm high-harmonic EUV beams with novel ptychography reconstruction algorithms, we demonstrate diffraction-limit high-NA and sub-wavelength resolution imaging at EUV wavelengths for the first time, representing a record resolution for full-field lightbased microscopy

}, year = {2017}, journal = {unknown}, month = {2017-09}, url = {https://www.osapublishing.org/abstract.cfm?URI=LS-2017-LM3F.4}, doi = {10.1364/LS.2017.LM3F.4}, }