@phdthesis{3446, author = {Matthew Seaberg}, title = {Nanoscale EUV Microscopy on a Tabletop: A General Transmission and Reflection Mode Microscope Based on Coherent Diffractive Imaging with High Harmonic Illumination}, abstract = {

A new scientic frontier exists at the intersection of the nanoscale and the ultrafast. In order\ to explore this frontier, new tools with unique capabilities for imaging with nanometer spatial and\ femtosecond temporal resolution are critical. This thesis describes the development of such a tool,\ combining coherent diffractive imaging (CDI) with an extreme ultraviolet (EUV) high harmonic\ generation (HHG) light source to produce a compact, accessible, high-resolution microscope. Here,\ this microscope is used to demonstrate 22 nm resolution in transmission, a record for any full-field\ tabletop light-based microscope. Further, this microscope is used to demonstrate the most general\ reflection mode implementation of CDI to date, enabling image reconstruction at any angle of\ incidence.

}, year = {2014}, volume = {Ph.D.}, pages = {192}, month = {2014-10}, publisher = {University of Colorado Boulder}, address = {Boulder}, }