@article{12318,
  author = {Michael Tanksalvala and Christina Porter and Yuka Esashi and Bin Wang and Nicholas Jenkins and Zhe Zhang and Galen Miley and Joshua Knobloch and Brendan McBennett and Naoto Horiguchi and Sadegh Yazdi and Jihan Zhou and Matthew Jacobs and Charles Bevis and Robert Karl and Peter Johnsen and David Ren and Laura Waller and Daniel Adams and Seth Cousin and Chen-Ting Liao and Jianwei Miao and Michael Gerrity and Henry Kapteyn and Margaret Murnane},
  title = {Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry},
  abstract = {Next-generation nano- and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here, we present the first phase-sensitive extreme ultraviolet imaging reflectometer. It combines the excellent phase stability of coherent high-harmonic sources, the unique chemical sensitivity of extreme ultraviolet reflectometry, and state-of-the-art ptychography imaging algorithms. This tabletop microscope can nondestructively probe surface topography, layer thicknesses, and interface quality, as well as dopant concentrations and profiles. High-fidelity imaging was achieved by implementing variable-angle ptychographic imaging, by using total variation regularization to mitigate noise and artifacts in the reconstructed image, and by using a high-brightness, high-harmonic source with excellent intensity and wavefront stability. We validate our measurements through multiscale, multimodal imaging to show that this technique has unique advantages compared with other techniques based on electron and scanning probe microscopies.},
  year = {2021},
  journal = {Science Advances},
  volume = {7},
  number = {5},
  pages = {eabd9667},
  month = {2021-01},
  publisher = {American Association for the Advancement of Science},
  url = {https://advances.sciencemag.org/content/7/5/eabd9667},
  doi = {10.1126/sciadv.abd9667},
}